caa a22 4500 467952817 CHVBK 20180322200726.0 cr unu---uuuuu 170328e19861101xx s 000 0 eng 10.1007/BF02431657 doi (NATIONALLICENCE)springer-10.1007/BF02431657 (NATIONALLICENCE)springer-10.1007/BF00553474 Transverse transmission electron microscopy of sputtered NbN films [Elektronische Daten] [H. Ho, K. Gray, R. Kampwirth, D. Capone II, A. Vicens, M. Meshii] A technique of preparing transverse sections of sputtered NbN films for transmission electron microscopy is presented. Microstructural details of grain morphologies, orientations, and phase compositions can be readily analysed using transverse specimens over the entire film thickness including the deposited film-substrate interface. Chapman and Hall Ltd., 1986 Ho H. Materials Science and Technology Division, Argonne National Laboratory, 60439, Argonne, Illinois, USA aut Gray K. Materials Science and Technology Division, Argonne National Laboratory, 60439, Argonne, Illinois, USA aut Kampwirth R. Materials Science and Technology Division, Argonne National Laboratory, 60439, Argonne, Illinois, USA aut Capone II D. Materials Science and Technology Division, Argonne National Laboratory, 60439, Argonne, Illinois, USA aut Vicens A. Materials Science and Technology Division, Argonne National Laboratory, 60439, Argonne, Illinois, USA aut Meshii M. Department of Materials Science and Engineering, Northwestern University, 60201, Evanston, Illinois, USA aut Journal of Materials Science Kluwer Academic Publishers 21/11(1986-11-01), 4097-4100 0022-2461 21:11<4097 1986 21 10853 https://doi.org/10.1007/BF02431657 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02431657 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ho H. Materials Science and Technology Division, Argonne National Laboratory, 60439, Argonne, Illinois, USA aut NATIONALLICENCE 700 1- Gray K. Materials Science and Technology Division, Argonne National Laboratory, 60439, Argonne, Illinois, USA aut NATIONALLICENCE 700 1- Kampwirth R. Materials Science and Technology Division, Argonne National Laboratory, 60439, Argonne, Illinois, USA aut NATIONALLICENCE 700 1- Capone II D. Materials Science and Technology Division, Argonne National Laboratory, 60439, Argonne, Illinois, USA aut NATIONALLICENCE 700 1- Vicens A. Materials Science and Technology Division, Argonne National Laboratory, 60439, Argonne, Illinois, USA aut NATIONALLICENCE 700 1- Meshii M. Department of Materials Science and Engineering, Northwestern University, 60201, Evanston, Illinois, USA aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers 21/11(1986-11-01), 4097-4100 0022-2461 21:11<4097 1986 21 10853 NATIONALLICENCE 856 40 https://doi.org/10.1007/BF00553474 text/html Onlinezugriff via DOI Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE NATIONALLICENCE NL-springer