caa a22 4500 46799563X CHVBK 20180323112556.0 cr unu---uuuuu 170328e19900101xx s 000 0 eng 10.1007/BF01244157 doi (NATIONALLICENCE)springer-10.1007/BF01244157 Quantitative surface analysis by X-ray photoelectron spectroscopy and X-ray excited auger electron spectroscopy [Elektronische Daten] [Maria Ebel, Horst Ebel] It is shown that X-ray excited KLL Auger electron spectra allow it to describe measured signal strengths similarly to X-ray photoelectron signals, thus offering valuable information on the quantitative surface composition of a solid sample. The principal equation and corresponding fundamental parameters are discussed. As a result Auger spectra of C, N, O, F, and Na can be easily used in a multiline approach for quantitative analysis. LMM and MNN spectra give rise to more problems, due to their more complicated structure, uncertainties with regard to the background and the influence of Coster-Kronig transitions. These problems are overcome by the use of empirical ratios of the strongest lines of 2p/LMM or 3d/MNN. Since these ratios are independent of sample composition, they allow it to transform the Auger signal into the corresponding photoelectron signal, provided that a standard sample has been measured. Thus a true additional information is obtained and moreover difficulties in cases of photoelectron spectra with overlapping lines from other chemical elements can be overcome. Springer-Verlag, 1990 quantitative surface analysis nationallicence X-ray photoelectron spectroscopy nationallicence X-ray excited Auger electron spectroscopy nationallicence analysis without reference samples nationallicence Ebel Maria Institut für Angewandte und Technische Physik, Technische Universität Wien, Wiedner Hauptstrasse 8-10, A-1040, Wien, Austria aut Ebel Horst Institut für Angewandte und Technische Physik, Technische Universität Wien, Wiedner Hauptstrasse 8-10, A-1040, Wien, Austria aut Microchimica Acta Springer-Verlag 101/1-6(1990-01-01), 49-54 0026-3672 101:1-6<49 1990 101 604 https://doi.org/10.1007/BF01244157 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF01244157 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ebel Maria Institut für Angewandte und Technische Physik, Technische Universität Wien, Wiedner Hauptstrasse 8-10, A-1040, Wien, Austria aut NATIONALLICENCE 700 1- Ebel Horst Institut für Angewandte und Technische Physik, Technische Universität Wien, Wiedner Hauptstrasse 8-10, A-1040, Wien, Austria aut NATIONALLICENCE 773 0- Microchimica Acta Springer-Verlag 101/1-6(1990-01-01), 49-54 0026-3672 101:1-6<49 1990 101 604 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer