caa a22 4500 467995907 CHVBK 20180323112557.0 cr unu---uuuuu 170328e19900101xx s 000 0 eng 10.1007/BF01244160 doi (NATIONALLICENCE)springer-10.1007/BF01244160 The effect of carbonaceous contamination on the investigation of the surface oxide on silicon by angle-resolved XPS [Elektronische Daten] [Werner Gries, Ergan Adem] The carbon-contaminated native oxide layer on a standard silicon wafer was investigated by angle-resolved signal ratio X-ray photoelectron spectroscopy (AR/SR/XPS). The results, based on intensity measurements of C1s , O1s , Si 2p 4+ and Sielemental 2p showed the carbon to be "ingested” into the oxide to a mean depth of 0.4 nm, and the oxide to consist of a fully oxidized layer (∼ 1 nm) on top, followed by a suboxidic layer (0.8 nm). The conclusions are that the depth location of the carbonaceous contamination is of cardinal importance for the correct interpretation of the oxidic data, and that for well studied systems routine measurements at two take-off angles suffice for quantitative results. Springer-Verlag, 1990 carbonaceous surface contamination nationallicence native oxide layer nationallicence silicon wafer nationallicence angle-resolved XPS nationallicence Gries Werner Research Institute of the Deutsche Bundespost, FTZ, P.O. Box 5000, D-6100, Darmstadt, Federal Republic of Germany aut Adem Ergan V. G. Scientific Ltd., East Grinstead, W. Sussex, Great Britain aut Microchimica Acta Springer-Verlag 101/1-6(1990-01-01), 71-80 0026-3672 101:1-6<71 1990 101 604 https://doi.org/10.1007/BF01244160 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF01244160 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Gries Werner Research Institute of the Deutsche Bundespost, FTZ, P.O. Box 5000, D-6100, Darmstadt, Federal Republic of Germany aut NATIONALLICENCE 700 1- Adem Ergan V. G. Scientific Ltd., East Grinstead, W. Sussex, Great Britain aut NATIONALLICENCE 773 0- Microchimica Acta Springer-Verlag 101/1-6(1990-01-01), 71-80 0026-3672 101:1-6<71 1990 101 604 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer