caa a22 4500 469051426 CHVBK 20180323132831.0 cr unu---uuuuu 170328e19921201xx s 000 0 eng 10.1007/BF01213528 doi (NATIONALLICENCE)springer-10.1007/BF01213528 Depth perception using blurring and its application in VLSI wafer probing [Elektronische Daten] [R. Dantu, N. Dimopoulos, R. Patel, A. Al-Khalili] In this paper, we present a technique for measuring the amount of blur of an edge and using this information to determine the distance of a micromanipulator probe from a wafer surface in very large scale integration (VLSI) wafer probing. In this application, a soft and reliable touch of the probe with a metal pad in the wafer is a sensitive operation. The wafer is focused and several images of the probe while approaching the wafer are analyzed. In our theory, the amount of blur is calculated from the height of the step edge and the slope of the intensity profile at the zero crossing. Hence, our formula is simple and easy to use. We estimate the distance of the probe from the surface of the wafer and obtain a robust measure, i.e., one which is valid even in the presence of significant noise in the images. In order to validate our methods, we have experimented with various VLSI patterns as backgrounds. Springer-Verlag New York Inc, 1992 machine vision nationallicence depth perception nationallicence blurring nationallicence wafer probing nationallicence Dantu R. Department of Electrical and Computer Engineering, Concordia University, Montreal, Canada aut Dimopoulos N. Department of Electrical and Computer Engineering, Concordia University, Montreal, Canada aut Patel R. Department of Electrical and Computer Engineering, Concordia University, Montreal, Canada aut Al-Khalili A. Department of Electrical and Computer Engineering, Concordia University, Montreal, Canada aut Machine Vision and Applications Springer-Verlag 5/1(1992-12-01), 35-45 0932-8092 5:1<35 1992 5 138 https://doi.org/10.1007/BF01213528 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF01213528 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Dantu R. Department of Electrical and Computer Engineering, Concordia University, Montreal, Canada aut NATIONALLICENCE 700 1- Dimopoulos N. Department of Electrical and Computer Engineering, Concordia University, Montreal, Canada aut NATIONALLICENCE 700 1- Patel R. Department of Electrical and Computer Engineering, Concordia University, Montreal, Canada aut NATIONALLICENCE 700 1- Al-Khalili A. Department of Electrical and Computer Engineering, Concordia University, Montreal, Canada aut NATIONALLICENCE 773 0- Machine Vision and Applications Springer-Verlag 5/1(1992-12-01), 35-45 0932-8092 5:1<35 1992 5 138 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer