caa a22 4500 469091282 CHVBK 20180323133018.0 cr unu---uuuuu 170328e19920601xx s 000 0 eng 10.1007/BF02655431 doi (NATIONALLICENCE)springer-10.1007/BF02655431 Electrical conductivity and photoluminescence of diamond films grown by downstream microwave plasma CVD [Elektronische Daten] [B. Stoner, J. Glass, L. Bergman, R. Nemanich, L. Zoltal, J. Vandersande] Electrical conductivity measurements and photoluminescence (PL) were used to study the effects that sample distance from the plasma during growth has on the carrier transport properties of undoped CVD diamond. The films were grown by downstream microwave plasma chemical vapor deposition at distances from 0.5 to 2.0 cm from the edge of plasma glow. Electrical conductivity measurements were performed between room temperature and 1000° C and then complimented with Raman spectroscopy and PL studies in an attempt to gain a better understanding of the CVD growth process and the resulting electrical and optical properties of the diamond films. Room temperature electrical conductivity was found to vary by over 5 orders of magnitude with increasing growth distance from the plasma, while only moderate changes were observed in the luminescence spectra. TMS, 1992 Diamond nationallicence electrical conductivity nationallicence photoluminescence nationallicence Stoner B. Materials Science and Engineering Department, North Carolina State University, 27695, Raleigh, NC aut Glass J. Materials Science and Engineering Department, North Carolina State University, 27695, Raleigh, NC aut Bergman L. Department of Physics, North Carolina State University, 27695, Raleigh, NC aut Nemanich R. Department of Physics, North Carolina State University, 27695, Raleigh, NC aut Zoltal L. Jet Propulsion Laboratory, California Institute of Technology, 91109, Pasadena, CA aut Vandersande J. Jet Propulsion Laboratory, California Institute of Technology, 91109, Pasadena, CA aut Journal of Electronic Materials Springer-Verlag 21/6(1992-06-01), 629-634 0361-5235 21:6<629 1992 21 11664 https://doi.org/10.1007/BF02655431 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02655431 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Stoner B. Materials Science and Engineering Department, North Carolina State University, 27695, Raleigh, NC aut NATIONALLICENCE 700 1- Glass J. Materials Science and Engineering Department, North Carolina State University, 27695, Raleigh, NC aut NATIONALLICENCE 700 1- Bergman L. Department of Physics, North Carolina State University, 27695, Raleigh, NC aut NATIONALLICENCE 700 1- Nemanich R. Department of Physics, North Carolina State University, 27695, Raleigh, NC aut NATIONALLICENCE 700 1- Zoltal L. Jet Propulsion Laboratory, California Institute of Technology, 91109, Pasadena, CA aut NATIONALLICENCE 700 1- Vandersande J. Jet Propulsion Laboratory, California Institute of Technology, 91109, Pasadena, CA aut NATIONALLICENCE 773 0- Journal of Electronic Materials Springer-Verlag 21/6(1992-06-01), 629-634 0361-5235 21:6<629 1992 21 11664 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer