caa a22 4500 469091339 CHVBK 20180323133018.0 cr unu---uuuuu 170328e19920901xx s 000 0 eng 10.1007/BF02665545 doi (NATIONALLICENCE)springer-10.1007/BF02665545 Automatic counting of etch Pits in InP [Elektronische Daten] [E. Peiner, A. Schlachetzki] A computer algorithm for automatic EPD-counting (etch-pit density) with an optical microscope is presented. Several dislocation etchants proposed in the literature to reveal structural defects on InP were employed and improved. Their reliability for automatic counting was proven. For a considerable number of samples exhibiting an EPD between 104 and 106 cm−2 it is shown that the automatically counted number of etch pits agrees with the visually determined value within less than ±30%. Using a modified H3PO4:HBr etchant good results for automatically determined EPDs beyond 107 cm−2 were obtained on InP layers epitaxially grown on Si substrates. TMS, 1992 Etch-pit density nationallicence automatic counting nationallicence InP-on-Si nationallicence MOVPE nationallicence Peiner E. Institut für Halbleitertechnik, Technische Universität Braunschweig, Hans-Sommer-Str. 66, D-3300, Braunschweig, FRG aut Schlachetzki A. Institut für Halbleitertechnik, Technische Universität Braunschweig, Hans-Sommer-Str. 66, D-3300, Braunschweig, FRG aut Journal of Electronic Materials Springer-Verlag 21/9(1992-09-01), 887-892 0361-5235 21:9<887 1992 21 11664 https://doi.org/10.1007/BF02665545 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02665545 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Peiner E. Institut für Halbleitertechnik, Technische Universität Braunschweig, Hans-Sommer-Str. 66, D-3300, Braunschweig, FRG aut NATIONALLICENCE 700 1- Schlachetzki A. Institut für Halbleitertechnik, Technische Universität Braunschweig, Hans-Sommer-Str. 66, D-3300, Braunschweig, FRG aut NATIONALLICENCE 773 0- Journal of Electronic Materials Springer-Verlag 21/9(1992-09-01), 887-892 0361-5235 21:9<887 1992 21 11664 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer