caa a22 4500 469091398 CHVBK 20180323133018.0 cr unu---uuuuu 170328e19920901xx s 000 0 eng 10.1007/BF02665549 doi (NATIONALLICENCE)springer-10.1007/BF02665549 On the source of scatter in contact resistance data [Elektronische Daten] [S. Winterton, T. Smy, N. Tarr] Previous treatments have assumed that small fluctuations in contact window dimensions between devices are chiefly responsible for the scatter in contact resistance data. Although this is plausible, it is shown in this paper that the source of this scatter is variation in contact resistivity, ρc, from resistor to resistor. It is further suggested that ρc is Cauchy distributed. Since standard deviation is in theory infinite for a Cauchy distribution, very high values of resistance at a contact window would occur with much greater frequency than common sense might suggest. TMS, 1992 Contact resistance nationallicence contact resistivity nationallicence scatter nationallicence ρ c : contact resistivity nationallicence R : resistance nationallicence T : wafer thickness nationallicence A : wafer area nationallicence ρ B : bulk resistivity nationallicence L : contact window length nationallicence α : dimensionless contact resistivity, ρc/ρB L nationallicence σ : standard deviation nationallicence σR : standard deviation in resistance nationallicence σ l : standard deviation in contact window length nationallicence α ρc : standard deviation in contact resistivity nationallicence N : number of observations nationallicence C(N,m) : binomial coefficient nationallicence f(R) : probability density ofR nationallicence αμ : parameters of Cauchy distribution nationallicence P : probability nationallicence R : average resistance nationallicence Winterton S. Department of Electronics, Carleton University, Colonel By Drive, K1S 5B6, Ottawa, Ontario, Canada aut Smy T. Department of Electronics, Carleton University, Colonel By Drive, K1S 5B6, Ottawa, Ontario, Canada aut Tarr N. Department of Electronics, Carleton University, Colonel By Drive, K1S 5B6, Ottawa, Ontario, Canada aut Journal of Electronic Materials Springer-Verlag 21/9(1992-09-01), 917-921 0361-5235 21:9<917 1992 21 11664 https://doi.org/10.1007/BF02665549 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02665549 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Winterton S. Department of Electronics, Carleton University, Colonel By Drive, K1S 5B6, Ottawa, Ontario, Canada aut NATIONALLICENCE 700 1- Smy T. Department of Electronics, Carleton University, Colonel By Drive, K1S 5B6, Ottawa, Ontario, Canada aut NATIONALLICENCE 700 1- Tarr N. Department of Electronics, Carleton University, Colonel By Drive, K1S 5B6, Ottawa, Ontario, Canada aut NATIONALLICENCE 773 0- Journal of Electronic Materials Springer-Verlag 21/9(1992-09-01), 917-921 0361-5235 21:9<917 1992 21 11664 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer