caa a22 4500 469092254 CHVBK 20180323133020.0 cr unu---uuuuu 170328e19920801xx s 000 0 eng 10.1007/BF02665523 doi (NATIONALLICENCE)springer-10.1007/BF02665523 Reactions between Pd thin films and InP [Elektronische Daten] [Douglas Ivey, Ping Jian, Robert Bruce] The reactions between Pd thin films and (001) oriented InP have been studied in detail. Palladium was deposited on InP by electron beam evaporation to a thickness of 60 nm. Specimens were then annealed in vacuum at temperatures up to 500° C for as long as several days. An amorphous ternary phase (Pd≈3InP) formed during deposition. During annealing, several crystalline ternary phases were detected. Pd2InP and Pd5InP were detected at lower annealing temperatures,i.e. from 225-275° C. Pd2InP grew first, exhibiting an epitaxial relationship with InP, followed by preferred growth of Pd5InP within the Pd2InP layer. Both phases later decomposed (≈400° C) producing Pd2InP(II), which also grew epitaxially on InP. At temperatures greater than 400° C, Pd2InP(II) decomposed to Pdln and PdP2, which were thermodynamically stable in contact with InP. TMS, 1992 Metallization nationallicence palladium nationallicence InP nationallicence Ivey Douglas Department of Mining, Metallurgical and Petroleum Engineering, University of Alberta, T6G 2G6, Edmonton, Alberta, Canada aut Jian Ping Department of Mining, Metallurgical and Petroleum Engineering, University of Alberta, T6G 2G6, Edmonton, Alberta, Canada aut Bruce Robert Bell Northern Research, Ltd., Station C, P.O. Box 3511, K1Y 4H7, Ottawa, Ontario, Canada aut Journal of Electronic Materials Springer-Verlag 21/8(1992-08-01), 831-839 0361-5235 21:8<831 1992 21 11664 https://doi.org/10.1007/BF02665523 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02665523 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ivey Douglas Department of Mining, Metallurgical and Petroleum Engineering, University of Alberta, T6G 2G6, Edmonton, Alberta, Canada aut NATIONALLICENCE 700 1- Jian Ping Department of Mining, Metallurgical and Petroleum Engineering, University of Alberta, T6G 2G6, Edmonton, Alberta, Canada aut NATIONALLICENCE 700 1- Bruce Robert Bell Northern Research, Ltd., Station C, P.O. Box 3511, K1Y 4H7, Ottawa, Ontario, Canada aut NATIONALLICENCE 773 0- Journal of Electronic Materials Springer-Verlag 21/8(1992-08-01), 831-839 0361-5235 21:8<831 1992 21 11664 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer