caa a22 4500 469092637 CHVBK 20180323133021.0 cr unu---uuuuu 170328e19921101xx s 000 0 eng 10.1007/BF02665878 doi (NATIONALLICENCE)springer-10.1007/BF02665878 Heat flow modeling of chemical vapor deposition of tungsten for improved film thickness uniformity [Elektronische Daten] [Julius Chang, Lisa Megna] The boundary element method is used to model the heat flow in a tungsten chemical vapor deposition (CVD W) reactor to determine the origin of the tungsten film thickness variation across a 125 mmp-type silicon wafer. The typical thickness nonuniformity is 7-10%. The model predicts temperature variations in the graphite susceptor which heats the wafers. The resulting temperature difference between the center and edge of a wafer can be up to 20 °C. Deposition rate experiments in a CVD W reactor confirm this. Experiments involving changes in the gas flow geometry have been conducted. It is concluded that the temperature gradient across the wafer, not the gas flow geometry, is the dominant factor controlling film thickness uniformity for this CVD W reactor. TMS, 1992 CVD reactor nationallicence Heat flow modeling nationallicence Si nationallicence Chang Julius IBM Technology Products, 05452-4299, Essex Junction, Vermont aut Megna Lisa IBM Technology Products, 05452-4299, Essex Junction, Vermont aut Journal of Electronic Materials Springer-Verlag 21/11(1992-11-01), 1019-1025 0361-5235 21:11<1019 1992 21 11664 https://doi.org/10.1007/BF02665878 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02665878 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Chang Julius IBM Technology Products, 05452-4299, Essex Junction, Vermont aut NATIONALLICENCE 700 1- Megna Lisa IBM Technology Products, 05452-4299, Essex Junction, Vermont aut NATIONALLICENCE 773 0- Journal of Electronic Materials Springer-Verlag 21/11(1992-11-01), 1019-1025 0361-5235 21:11<1019 1992 21 11664 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer