caa a22 4500 469122781 CHVBK 20180323133143.0 cr unu---uuuuu 170328e19920701xx s 000 0 eng 10.1007/BF02368134 doi (NATIONALLICENCE)springer-10.1007/BF02368134 A glass/silicon composite intracortical electrode array [Elektronische Daten] [Kelly Jones, Patrick Campbell, Richard Normann] A new manufacturing technique has been developed for creating silicon-based, penetrating electrode arrays intended for implantation into cerebral cortex. The arrays consist of a 4.2 mm×4.2 mm glass/silicon composite base, from which project 100 silicon needle-type electrodes in a 10×10 array. Each needle is approximately 1,500 μm long, 80μm in diameter at the base, and tapers to a sharp point at the metalized tip. The technique used to manufacture these arrays differs from our previous method in that a glass dielectric, rather than ap-n-p junction, provides electrical isolation between the individual electrodes in the array. The new electrode arrays exhibit superior electrical properties to those described previously. We have measured interelectrode impedances of at least 1013 Ω, and interelectrode capacitances of approximately 50 fF for the new arrays. In this paper, we describe the manufacturing techniques used to create the arrays, focusing on the dielectric isolation technique, and discuss the electrical and mechanical characteristics of these arrays. Pergamon Press Ltd., 1992 Micromachining nationallicence Electrode array nationallicence Neural interface nationallicence Intracortical electrodes nationallicence Jones Kelly Department of Bioengineering, University of Utah, 84112, Salt Lake City, UT aut Campbell Patrick Department of Bioengineering, University of Utah, 84112, Salt Lake City, UT aut Normann Richard Department of Bioengineering, University of Utah, 84112, Salt Lake City, UT aut Annals of Biomedical Engineering Kluwer Academic Publishers 20/4(1992-07-01), 423-437 0090-6964 20:4<423 1992 20 10439 https://doi.org/10.1007/BF02368134 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02368134 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Jones Kelly Department of Bioengineering, University of Utah, 84112, Salt Lake City, UT aut NATIONALLICENCE 700 1- Campbell Patrick Department of Bioengineering, University of Utah, 84112, Salt Lake City, UT aut NATIONALLICENCE 700 1- Normann Richard Department of Bioengineering, University of Utah, 84112, Salt Lake City, UT aut NATIONALLICENCE 773 0- Annals of Biomedical Engineering Kluwer Academic Publishers 20/4(1992-07-01), 423-437 0090-6964 20:4<423 1992 20 10439 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer