Evaluation of the Thermophysical Characteristics of a Bubbling-Type Reactor on Transformation of Silicon Tetrafluoride into Monosilane
Gespeichert in:
Verfasser / Beitragende:
[N. Stepanenko, V. Vasilevich, V. Nemtsev]
Ort, Verlag, Jahr:
2002
Enthalten in:
Journal of Engineering Physics and Thermophysics, 75/6(2002-11-01), 1319-1322
Format:
Artikel (online)
Online Zugang: