Electron backscattering diffraction investigation of focused ion beam surfaces

Verfasser / Beitragende:
[T. Matteson, S. Schwarz, E. Houge, B. Kempshall, L. Giannuzzi]
Ort, Verlag, Jahr:
2002
Enthalten in:
Journal of Electronic Materials, 31/1(2002-01-01), 33-39
Format:
Artikel (online)
ID: 471147028