Effect of the underlayer on the microstructure and surface evolution in Al-0.5wt.%Cu polycrystalline thin films

Verfasser / Beitragende:
[Adriana Lita, John Sanchez Jr.]
Ort, Verlag, Jahr:
2002
Enthalten in:
Journal of Electronic Materials, 31/1(2002-01-01), 55-65
Format:
Artikel (online)
ID: 471147141