Electrical properties of carbon nitride thin films: Role of morphology and hydrogen content

Verfasser / Beitragende:
[E. Broitman, N. Hellgren, J. Neidhardt, I. Brunell, L. Hultman]
Ort, Verlag, Jahr:
2002
Enthalten in:
Journal of Electronic Materials, 31/9(2002-09-01), L11-L15
Format:
Artikel (online)
ID: 471147370