Photonic effects during low-temperature ultraviolet-assisted oxidation of SiGe

Verfasser / Beitragende:
[V. Craciun, R. Singh, Ian Boyd]
Ort, Verlag, Jahr:
2002
Enthalten in:
Journal of Electronic Materials, 31/12(2002-12-01), 1325-1329
Format:
Artikel (online)
ID: 471147745