Vapor pressures of the adducts formed during AlGaN organometallic vapor-phase epitaxy

Verfasser / Beitragende:
[J. Creighton]
Ort, Verlag, Jahr:
2002
Enthalten in:
Journal of Electronic Materials, 31/12(2002-12-01), 1337-1340
Format:
Artikel (online)
ID: 47114780X