Moisture absorption studies of fluorocarbon films deposited from pentafluoroethane and octafluorocyclobutane plasmas

Verfasser / Beitragende:
[Ravindra Tanikella, Sairam Agraharam, Sue Bidstrup Allen, Dennis Hess, Paul Kohl]
Ort, Verlag, Jahr:
2002
Enthalten in:
Journal of Electronic Materials, 31/10(2002-10-01), 1096-1103
Format:
Artikel (online)
ID: 471148040