Electrical and compositional properties of TaSi2 films

Verfasser / Beitragende:
[N. Ravindra, Lei Jin, Dentcho Ivanov, Vishal Mehta, Lamine Dieng, Guerman Popov, Oktay Gokce, James Grow, Anthony Fiory]
Ort, Verlag, Jahr:
2002
Enthalten in:
Journal of Electronic Materials, 31/10(2002-10-01), 1074-1079
Format:
Artikel (online)
ID: 471148180