Rapid growth of particles by coagulation between particles in silane plasma reactor

Verfasser / Beitragende:
[Dong-Joo Kim, Kyo-Seon Kim]
Ort, Verlag, Jahr:
2002
Enthalten in:
Korean Journal of Chemical Engineering, 19/3(2002-05-01), 495-504
Format:
Artikel (online)
ID: 47115251X