caa a22 4500 475791843 CHVBK 20180406123713.0 cr unu---uuuuu 170329e20001101xx s 000 0 eng 10.1007/s005420000068 doi (NATIONALLICENCE)springer-10.1007/s005420000068 LIGA fabrication and test of a DC type magnetohydrodynamic (MHD) micropump [Elektronische Daten] [L. Huang, W. Wang, M. C. Murphy, K. Lian, Z.-G. Ling]  This paper reports a research effort to design, microfabricate and test a DC type magnetohydrodynamic (MHD) micropump using LIGA method (Menz et al., 1991). The micropump is driven using the Lorentz force and can be used to deliver electrically conductive fluids. In operation, a DC voltage is supplied across the electrodes to generate the distributed body force on the fluid in the pumping chamber, and therefore a constant pressure difference along the pumping chamber. The external magnetic field was supplied using permanent magnets. The major advantage of a MHD-based micropump is that it does not contain any moving parts. It may have potential applications in medicine delivery, biological and biomedical studies. The test of the DC prototype micropump shows that bubble generation mechanism affect the performance significantly and an AC driving mechanism may be used to improve the performance. Springer-Verlag Berlin Heidelberg, 2000 Huang L. Department of Mechanical Engineering, Louisiana State University, Baton Rouge, LA 70803, USA, US aut Wang W. Department of Mechanical Engineering, Louisiana State University, Baton Rouge, LA 70803, USA, US aut Murphy M. C. Department of Mechanical Engineering, Louisiana State University, Baton Rouge, LA 70803, USA, US aut Lian K. Center for Advanced Micro-structures and Devices, Louisiana State University, Baton Rouge, LA 70806, USA, US aut Ling Z.-G Center for Advanced Micro-structures and Devices, Louisiana State University, Baton Rouge, LA 70806, USA, US aut https://doi.org/10.1007/s005420000068 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420000068 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Huang L. Department of Mechanical Engineering, Louisiana State University, Baton Rouge, LA 70803, USA, US aut NATIONALLICENCE 700 1- Wang W. Department of Mechanical Engineering, Louisiana State University, Baton Rouge, LA 70803, USA, US aut NATIONALLICENCE 700 1- Murphy M. C. Department of Mechanical Engineering, Louisiana State University, Baton Rouge, LA 70803, USA, US aut NATIONALLICENCE 700 1- Lian K. Center for Advanced Micro-structures and Devices, Louisiana State University, Baton Rouge, LA 70806, USA, US aut NATIONALLICENCE 700 1- Ling Z.-G Center for Advanced Micro-structures and Devices, Louisiana State University, Baton Rouge, LA 70806, USA, US aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer