caa a22 4500 475791851 CHVBK 20180406123713.0 cr unu---uuuuu 170329e20001101xx s 000 0 eng 10.1007/s005420000059 doi (NATIONALLICENCE)springer-10.1007/s005420000059 Electroplated compliant metal microactuators with small feature sizes using a removable SU-8 mould [Elektronische Daten] [R. K. Vestergaard, S. Bouwstra] In the work presented in this article a fabrication process for high aspect ratio metal microstructures has been developed using photoresist EPON SU-8. A smallest feature size of 2 μm with near vertical sidewalls has been achieved on a routine basis. The SU-8 photoresist has been used as mould for electroplating high aspect ratio metal micro actuators. A removal process has also been developed. The removal of the SU-8 mould after plating is done in a plasma asher using an oxygen or oxygen/fluorine plasma with plasma power as low as 200 W. To demonstrate the fabrication process a 10 μm thick nickel, electro-thermal micro actuator has been fabricated. Springer-Verlag Berlin Heidelberg, 2000 Vestergaard R. K. The Microelectronics Centre, Technical University of Denmark, Bldg. 345 east, DK-2800 Lyngby, Denmark, DK aut Bouwstra S. The Microelectronics Centre, Technical University of Denmark, Bldg. 345 east, DK-2800 Lyngby, Denmark, DK aut https://doi.org/10.1007/s005420000059 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420000059 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Vestergaard R. K. The Microelectronics Centre, Technical University of Denmark, Bldg. 345 east, DK-2800 Lyngby, Denmark, DK aut NATIONALLICENCE 700 1- Bouwstra S. The Microelectronics Centre, Technical University of Denmark, Bldg. 345 east, DK-2800 Lyngby, Denmark, DK aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer