caa a22 4500 475791878 CHVBK 20180406123713.0 cr unu---uuuuu 170329e20001101xx s 000 0 eng 10.1007/s005420000055 doi (NATIONALLICENCE)springer-10.1007/s005420000055 Akedo J. Mechanical Engineering Laboratory, Ministry of International Trade and Industry, 1-2 Namiki, Tsukuba, Ibaraki, 305-8564, Japan e-mail: akedo@mel.go.jp, JP aut Study on rapid micro-structuring using Jet molding - Present status and structuring properties toward HARMST [Elektronische Daten] [J. Akedo] Ultra-fine particles of metal and ceramic materials jetting with the velocities of several hundreds m/s is accumulated on the substrate based on impact adhesion. Recently, the application of this phenomenon for micro electro mechanical systems and micro devise has been investigated. In this paper, the deposition method based on ultra-fine particle beam and possibilities of its application as HARMST are reported. Springer-Verlag Berlin Heidelberg, 2000 https://doi.org/10.1007/s005420000055 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420000055 text/html Onlinezugriff via DOI NATIONALLICENCE 100 1- Akedo J. Mechanical Engineering Laboratory, Ministry of International Trade and Industry, 1-2 Namiki, Tsukuba, Ibaraki, 305-8564, Japan e-mail: akedo@mel.go.jp, JP aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer