caa a22 4500 475791886 CHVBK 20180406123713.0 cr unu---uuuuu 170329e20001101xx s 000 0 eng 10.1007/s005420000067 doi (NATIONALLICENCE)springer-10.1007/s005420000067 Micro flame spectrometer [Elektronische Daten] [S. Zimmermann, J. Müller] This paper presents a micro atomic emission flame spectrometer fabricated by standard micromachining technologies. The main component is a micro burner unit which consumes a minimum of oxyhydrogen to produce a stable miniature flame. The oxyhydrogen is generated in a miniaturized electrolysis cell which can be operated by battery. Via a sample gas injection system, which is integrated into the micro burner unit, gaseous samples are injected into the flame. Liquid samples are atomized by a miniature piezo driven ultrasonic atomizer and injected directly. An optical micro spectrometer system is used to investigate the flame emission. Because of the minute scale of all components and the low consumption of oxyhydrogen, which is generated as-required, rather than stored as in conventional systems, the micro flame spectrometer is easily portable and completely safe in operation. Furthermore, at this early stage detection limits just 1½ magnitude above most sophisticated systems are demonstrated for alkali metals and comparable detection limits appear within reach. Springer-Verlag Berlin Heidelberg, 2000 Zimmermann S. Technical University Hamburg-Harburg, Semiconductor Technology, Eissendorfer Str. 42, D-21073 Hamburg, Germany E-mail: stefan.zimmermann@tuhh.de, DE aut Müller J. Technical University Hamburg-Harburg, Semiconductor Technology, Eissendorfer Str. 42, D-21073 Hamburg, Germany E-mail: stefan.zimmermann@tuhh.de, DE aut https://doi.org/10.1007/s005420000067 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420000067 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Zimmermann S. Technical University Hamburg-Harburg, Semiconductor Technology, Eissendorfer Str. 42, D-21073 Hamburg, Germany E-mail: stefan.zimmermann@tuhh.de, DE aut NATIONALLICENCE 700 1- Müller J. Technical University Hamburg-Harburg, Semiconductor Technology, Eissendorfer Str. 42, D-21073 Hamburg, Germany E-mail: stefan.zimmermann@tuhh.de, DE aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer