caa a22 4500 475791894 CHVBK 20180406123713.0 cr unu---uuuuu 170329e20001101xx s 000 0 eng 10.1007/s005420000060 doi (NATIONALLICENCE)springer-10.1007/s005420000060 Thermal optimization of a micro valve array [Elektronische Daten] [D. Haefliger, D. Baechi, J. Dual, R. Buser] This paper describes the thermal optimization of an array of thermopneumatically actuated microvalves. The valve density achieved in the current prototype amounts to 100 valves per square inch. Thin valve membranes of less than 3 μm thickness allow for low temperature actuation. In order to reduce thermal cross talk between adjacent valves, cooling channels and insulating trenches have been introduced. It could be shown that these features reduce thermal cross talk and thus enhance array performance. The effectiveness of the cooling channels was characterized both experimentally and by means of finite element simulations. Since available theories for convective heat transfer showed some discrepancies for the examined device, the average heat transfer coefficient was determined experimentally. The comparison of computational simulation results and infra-red measurements showed good agreement. Finite element models allow reliable prediction and optimization of the performance of high-density valve arrays. Springer-Verlag Berlin Heidelberg, 2000 Haefliger D. ETH Zurich, Institute of Mechanical Systems, CH-8092 Zurich, Switzerland, CH aut Baechi D. ETH Zurich, Institute of Mechanical Systems, CH-8092 Zurich, Switzerland, CH aut Dual J. ETH Zurich, Institute of Mechanical Systems, CH-8092 Zurich, Switzerland, CH aut Buser R. Interstaatliche Fachhochschule für Technik Buchs, CH-9471 Buchs, Switzerland, CH aut https://doi.org/10.1007/s005420000060 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420000060 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Haefliger D. ETH Zurich, Institute of Mechanical Systems, CH-8092 Zurich, Switzerland, CH aut NATIONALLICENCE 700 1- Baechi D. ETH Zurich, Institute of Mechanical Systems, CH-8092 Zurich, Switzerland, CH aut NATIONALLICENCE 700 1- Dual J. ETH Zurich, Institute of Mechanical Systems, CH-8092 Zurich, Switzerland, CH aut NATIONALLICENCE 700 1- Buser R. Interstaatliche Fachhochschule für Technik Buchs, CH-9471 Buchs, Switzerland, CH aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer