caa a22 4500 475791975 CHVBK 20180406123713.0 cr unu---uuuuu 170329e20000201xx s 000 0 eng 10.1007/s005420050001 doi (NATIONALLICENCE)springer-10.1007/s005420050001 Manufacturing technologies for miniaturized interference filters [Elektronische Daten] [M. Frank, N. Kaiser]  Miniaturized interference filters were designed and fabricated using two different manufacturing technologies. Applying micromachined ceramic masks during the coating processes interference filters with 1 mm lateral feature size and an alignment accuracy of 50 μm were arranged in an array consisting of three different filters. The filter edge definition obtained by this method was smaller than 50 μm. By applying ion assisted deposition (IAD), a low-temperature coating process, the spectral sensitivity of receiver cells has been modified by coating the cells directly. A combination of coating processes, microlithographic masking procedures, and dry etching technologies made it possible to arrange three different stripe filters with minimum filter features of about 5 μm side by side. The accuracy during mask alignment and the filter edge definition was also within 1 and 2 μm, respectively. Springer-Verlag Berlin Heidelberg, 2000 Frank M. Fraunhofer Institut für Angewandte Optik und Feinmechanik Schillerstraße 1, D-07745 Jena, Germany, DE aut Kaiser N. Fraunhofer Institut für Angewandte Optik und Feinmechanik Schillerstraße 1, D-07745 Jena, Germany, DE aut https://doi.org/10.1007/s005420050001 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420050001 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Frank M. Fraunhofer Institut für Angewandte Optik und Feinmechanik Schillerstraße 1, D-07745 Jena, Germany, DE aut NATIONALLICENCE 700 1- Kaiser N. Fraunhofer Institut für Angewandte Optik und Feinmechanik Schillerstraße 1, D-07745 Jena, Germany, DE aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer