caa a22 4500 475792009 CHVBK 20180406123713.0 cr unu---uuuuu 170329e20000201xx s 000 0 eng 10.1007/s005420050010 doi (NATIONALLICENCE)springer-10.1007/s005420050010 ANKA - a synchrotron light source for X-ray based micromachining [Elektronische Daten] [J. Göttert, H. O. Moser, F. J. Pantenburg, V. Saile, R. Steininger]  ANKA (Angströmquelle Karlsruhe) is a state-of-the-art synchrotron radiation facility currently under construction at the Forschungszentrum Karlsruhe. Based on a 2.5 GeV electron storage ring it delivers photons from the infrared through to the hard X-rays. Operation of ANKA is scheduled for September 2000. Synchrotron radiation related services in the fields of microfabrication and analytical services will be available from ANKA GmbH to industrial clients and scientific users. Springer-Verlag Berlin Heidelberg, 2000 Göttert J. Forschungszentrum Karlsruhe, ANKA Project Group (PEA), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut Moser H. O. Forschungszentrum Karlsruhe, ANKA Project Group (PEA), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut Pantenburg F. J. Forschungszentrum Karlsruhe, Institute for Microstructure Technology (IMT), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut Saile V. Forschungszentrum Karlsruhe, Institute for Microstructure Technology (IMT), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut Steininger R. Forschungszentrum Karlsruhe, ANKA Project Group (PEA), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut https://doi.org/10.1007/s005420050010 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420050010 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Göttert J. Forschungszentrum Karlsruhe, ANKA Project Group (PEA), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut NATIONALLICENCE 700 1- Moser H. O. Forschungszentrum Karlsruhe, ANKA Project Group (PEA), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut NATIONALLICENCE 700 1- Pantenburg F. J. Forschungszentrum Karlsruhe, Institute for Microstructure Technology (IMT), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut NATIONALLICENCE 700 1- Saile V. Forschungszentrum Karlsruhe, Institute for Microstructure Technology (IMT), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut NATIONALLICENCE 700 1- Steininger R. Forschungszentrum Karlsruhe, ANKA Project Group (PEA), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer