caa a22 4500 475792017 CHVBK 20180406123713.0 cr unu---uuuuu 170329e20000201xx s 000 0 eng 10.1007/s005420050005 doi (NATIONALLICENCE)springer-10.1007/s005420050005 Fabrication of HARM structures by deep-X-ray lithography using graphite mask technology [Elektronische Daten] [P. Coane, R. Giasolli, S. Ledger, K. Lian, Z. Ling, J. Göttert] The cost-effective fabrication process for high-aspect-ratio microstructures using X-rays depends largely on the availability and quality of X-ray masks. The fabrication of X-ray masks using commercially available graphite sheet stock, as a mask membrane is one approach that is designed to reduce cost and turnaround time. Rigid graphite offers unique properties, such as moderate X-ray transmission, fairly low cost, electrical conductivity, and the ability to be used with either subtractive or additive processes [1, 2]. This paper will demonstrate the potential of a cost-effective, rapid prototyping of high-aspect-ratio microstructures (HARMs) using graphite masks. The graphite wafer accommodates both the intermediate mask and the working mask. In order to allow a direct comparison of the graphite mask quality with other X-ray masks, the primary pattern was derived from a Ti X-ray mask using soft X-ray lithography (XRL). Springer-Verlag Berlin Heidelberg, 2000 Coane P. Institute for Micromanufacturing, Louisiana Tech University, P.O. Box 10137, Ruston, LA 71272, US aut Giasolli R. Institute for Micromanufacturing, Louisiana Tech University, P.O. Box 10137, Ruston, LA 71272, US aut Ledger S. Institute for Micromanufacturing, Louisiana Tech University, P.O. Box 10137, Ruston, LA 71272, US aut Lian K. Center for Advanced Microstructures and Devices, 6980 Jefferson Hwy., Baton Rouge, LA 70806, US aut Ling Z. Center for Advanced Microstructures and Devices, 6980 Jefferson Hwy., Baton Rouge, LA 70806, US aut Göttert J. Forschungszentrum Karlsruhe, Project ANKA Team (PEA), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut https://doi.org/10.1007/s005420050005 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420050005 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Coane P. Institute for Micromanufacturing, Louisiana Tech University, P.O. Box 10137, Ruston, LA 71272, US aut NATIONALLICENCE 700 1- Giasolli R. Institute for Micromanufacturing, Louisiana Tech University, P.O. Box 10137, Ruston, LA 71272, US aut NATIONALLICENCE 700 1- Ledger S. Institute for Micromanufacturing, Louisiana Tech University, P.O. Box 10137, Ruston, LA 71272, US aut NATIONALLICENCE 700 1- Lian K. Center for Advanced Microstructures and Devices, 6980 Jefferson Hwy., Baton Rouge, LA 70806, US aut NATIONALLICENCE 700 1- Ling Z. Center for Advanced Microstructures and Devices, 6980 Jefferson Hwy., Baton Rouge, LA 70806, US aut NATIONALLICENCE 700 1- Göttert J. Forschungszentrum Karlsruhe, Project ANKA Team (PEA), P.O. Box 3640, D-76021 Karlsruhe, Germany, DE aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer