caa a22 4500 47579205X CHVBK 20180406123713.0 cr unu---uuuuu 170329e20000401xx s 000 0 eng 10.1007/s005420050184 doi (NATIONALLICENCE)springer-10.1007/s005420050184 Cost estimation for LIGA fabrication flows using process design methods [Elektronische Daten] [K. Hahn, R. Brück, A. Priebe, C. Schneider]  The design of microstructured components fabricated by LIGA combines concurrently the layout for mask lithography as well as the configuration of appropriate process sequences that allow the error-free fabrication of the microstructures. This paper describes methods and tools that support the design of consistent process step configurations that allow to predict in advance the effort assigned to specific process arrangements. Based on formal process description means the microsystems' designer can edit, assess and optimise consistent technology steps with regard to costs, time and feasibility providing an interface to later layout verification. Springer-Verlag Berlin Heidelberg, 2000 Hahn K. University of Siegen, Department 12, Institute of Computer Structures, Hölderlinstr. 3, D-57068 Siegen, Germany, DE aut Brück R. University of Siegen, Department 12, Institute of Computer Structures, Hölderlinstr. 3, D-57068 Siegen, Germany, DE aut Priebe A. University of Siegen, Department 12, Institute of Computer Structures, Hölderlinstr. 3, D-57068 Siegen, Germany, DE aut Schneider C. University of Siegen, Department 12, Institute of Computer Structures, Hölderlinstr. 3, D-57068 Siegen, Germany, DE aut https://doi.org/10.1007/s005420050184 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420050184 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Hahn K. University of Siegen, Department 12, Institute of Computer Structures, Hölderlinstr. 3, D-57068 Siegen, Germany, DE aut NATIONALLICENCE 700 1- Brück R. University of Siegen, Department 12, Institute of Computer Structures, Hölderlinstr. 3, D-57068 Siegen, Germany, DE aut NATIONALLICENCE 700 1- Priebe A. University of Siegen, Department 12, Institute of Computer Structures, Hölderlinstr. 3, D-57068 Siegen, Germany, DE aut NATIONALLICENCE 700 1- Schneider C. University of Siegen, Department 12, Institute of Computer Structures, Hölderlinstr. 3, D-57068 Siegen, Germany, DE aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer