caa a22 4500 475792106 CHVBK 20180406123714.0 cr unu---uuuuu 170329e20000401xx s 000 0 eng 10.1007/s005420050179 doi (NATIONALLICENCE)springer-10.1007/s005420050179 Adhesion of Ni-structures on Al2O3 ceramic substrates used for the sacrificial layer technique [Elektronische Daten] [Th. Kunz, J. Mohr, A. Ruzzu, K. D. Skrobanek, U. Wallrabe]  This study presents an investigation of the adhesion properties of a chromium-gold-titanium layer system, which is used in the LIGA process to create moveable microstructures. The main purpose has been the improvement of the process parameters to increase yield reliability. Three mechanisms affecting the adhesion have been identified. As a consequence of humidity adsorbed H2O reacts with Al2O3 to AlO(OH) (aluminum meta hydrates), which does not bond to the sputtered chromium layer. Thus the hydrate must be removed by cleaning the surface with Ar+-ions. Tight layers without pores could be realized by optimization pressure and temperature during sputtering of chromium and gold. Thus, diffusion of chromium or penetration of etchants into the gold layer as well as impact or diffusion of titanium into the gold layer could be prevented. In addition, a copper layer was introduced as a further intermediate layer by electroforming to improve the formation of stable nickel alloys at the interface between the sputtered gold and the electroplated nickel. These measures resulted in an improvement of the adhesion, so that full functional acceleration sensors were produced with a high yield. Springer-Verlag Berlin Heidelberg, 2000 Kunz Th Institut für Mikrostrukturtechnik IMT, Forschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany, DE aut Mohr J. Institut für Mikrostrukturtechnik IMT, Forschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany, DE aut Ruzzu A. Institut für Mikrostrukturtechnik IMT, Forschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany, DE aut Skrobanek K. D. Institut für Mikrostrukturtechnik IMT, Forschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany, DE aut Wallrabe U. Institut für Mikrostrukturtechnik IMT, Forschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany, DE aut https://doi.org/10.1007/s005420050179 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420050179 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Kunz Th Institut für Mikrostrukturtechnik IMT, Forschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany, DE aut NATIONALLICENCE 700 1- Mohr J. Institut für Mikrostrukturtechnik IMT, Forschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany, DE aut NATIONALLICENCE 700 1- Ruzzu A. Institut für Mikrostrukturtechnik IMT, Forschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany, DE aut NATIONALLICENCE 700 1- Skrobanek K. D. Institut für Mikrostrukturtechnik IMT, Forschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany, DE aut NATIONALLICENCE 700 1- Wallrabe U. Institut für Mikrostrukturtechnik IMT, Forschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany, DE aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer