caa a22 4500 475792114 CHVBK 20180406123714.0 cr unu---uuuuu 170329e20000801xx s 000 0 eng 10.1007/s005420000050 doi (NATIONALLICENCE)springer-10.1007/s005420000050 Why CMOS-integrated transducers? A review [Elektronische Daten] [A. Witvrouw, F. Van Steenkiste, D. Maes, L. Haspeslagh, P. Van Gerwen, P. De Moor, S. Sedky, C. Van Hoof, A. C. de Vries, A. Verbist, A. De Caussemaeker, B. Parmentier, K. Baert]  In many applications up to millions of sensors or actuators have to be interconnected to each other and/or to the outside world, making the monolithic integration of circuitry mandatory. This monolithic integration is also pursued for mass-produced transducers because of economical reasons. CMOS-integrated transducers are thus found in imaging transducers arrays and mass-produced physical sensors. In addition, integrated biochemical sensor arrays can be CMOS-integrated. In this article first a general overview of the field is given and then selected work in the imaging and biochemical field is highlighted. Concerning imaging transducer arrays an overview is given of visible and IR imagers, displays and of inkjet printheads. Concerning the new field of biochemical sensor arrays, two examples are described: a blood-gas sensor and an array of interdigitated electrodes. Finally an overview of the possible technological approaches regarding integrated processing of transducers is presented. Springer-Verlag Berlin Heidelberg, 2000 Witvrouw A. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut Van Steenkiste F. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut Maes D. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut Haspeslagh L. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut Van Gerwen P. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut De Moor P. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut Sedky S. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut Van Hoof C. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut de Vries A. C. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut Verbist A. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut De Caussemaeker A. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut Parmentier B. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut Baert K. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut https://doi.org/10.1007/s005420000050 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420000050 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Witvrouw A. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- Van Steenkiste F. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- Maes D. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- Haspeslagh L. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- Van Gerwen P. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- De Moor P. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- Sedky S. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- Van Hoof C. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- de Vries A. C. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- Verbist A. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- De Caussemaeker A. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- Parmentier B. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut NATIONALLICENCE 700 1- Baert K. IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, BE aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer