caa a22 4500 475792165 CHVBK 20180406123714.0 cr unu---uuuuu 170329e20000801xx s 000 0 eng 10.1007/s005429900035 doi (NATIONALLICENCE)springer-10.1007/s005429900035 Alternative resist adhesion and electroplating layers for LIGA process [Elektronische Daten] [A. El-Kholi, K. Bade, J. Mohr, F. J. Pantenburg, X.-M. Tang]  The fabrication of high aspect ratio microstructures using the X-ray lithography and electroplating step of the LIGA process requires, that the metal layer on the substrate (plating base) enables a flawless resist adhesion and provides a high conductivity for the following electroplating process. In addition, a flawless metal adhesion after electroplating has to be ensured. Typically metal layers of titanium, but also of copper and gold are used. In case of higher structures, fluorescence radiation generated in the metal layer during exposure reduces the bond strength between the resist and the adhesion layer [7]. Since the fluorescence probability decreases with a decreasing atomic number, the suitability of conductive carbon as the plating base was investigated and compared to results achieved with titanium. The resist adhesion was increased tremendously on the carbon layer but the metal adhesion is insufficient. Therefore, platinum islands were deposited on the conductive carbon to facilitate good metal adhesion. The resulting resist adhesion was still superior compared to titanium. In addition, metal adhesion was achieved on these layers. Springer-Verlag Berlin Heidelberg, 2000 El-Kholi A. Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein, Germany, DE aut Bade K. Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein, Germany, DE aut Mohr J. Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein, Germany, DE aut Pantenburg F. J. Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein, Germany, DE aut Tang X.-M Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein, Germany, DE aut https://doi.org/10.1007/s005429900035 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005429900035 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- El-Kholi A. Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein, Germany, DE aut NATIONALLICENCE 700 1- Bade K. Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein, Germany, DE aut NATIONALLICENCE 700 1- Mohr J. Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein, Germany, DE aut NATIONALLICENCE 700 1- Pantenburg F. J. Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein, Germany, DE aut NATIONALLICENCE 700 1- Tang X.-M Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein, Germany, DE aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer