caa a22 4500 475792181 CHVBK 20180406123714.0 cr unu---uuuuu 170329e20000801xx s 000 0 eng 10.1007/s005420000052 doi (NATIONALLICENCE)springer-10.1007/s005420000052 High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDM [Elektronische Daten] [K. Takahata, N. Shibaike, H. Guckel]  A high-aspect-ratio WC-Co (tungsten carbide super hard alloy) microstructure has been produced by a new microfabrication process which combines LIGA and micro-EDM (electro-discharge machining). The 1 mm long microstructure with gear pattern has a variation of 4 μm in the outside diameter along its length. In the process, LIGA fabricated electrodes of negative geometry are electroplated in a metal plate for use in the micro-EDM. Since the arrangement is extremely precise the serial micro-EDM processes for one workpiece can be implemented by exchanging worn electrodes for new ones via X-Y positioning between the workpiece and each electrode. In this type of machining any bulk conductor can be chosen as the material, which is to be shaped into a microstructure. WC-Co chosen in this experiment has a much larger Young's modulus and hardness than ordinary electroplated materials. The fabricated high-aspect-ratio WC-Co microstructures can have high resistance to buckling and wear when used as mechanical components or tools. Springer-Verlag Berlin Heidelberg, 2000 Takahata K. Matsushita Electric Industrial Co., Ltd., 2-7 Matsuba-cho, Kadoma, Osaka 571-8502, Japan, JP aut Shibaike N. Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214-8501, Japan, JP aut Guckel H. Department of Electrical and Computer Engineering, University of Wisconsin-Madison, 1415 Engineering Drive, Madison, WI 53706, USA, US aut https://doi.org/10.1007/s005420000052 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005420000052 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Takahata K. Matsushita Electric Industrial Co., Ltd., 2-7 Matsuba-cho, Kadoma, Osaka 571-8502, Japan, JP aut NATIONALLICENCE 700 1- Shibaike N. Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214-8501, Japan, JP aut NATIONALLICENCE 700 1- Guckel H. Department of Electrical and Computer Engineering, University of Wisconsin-Madison, 1415 Engineering Drive, Madison, WI 53706, USA, US aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer