caa a22 4500 47579219X CHVBK 20180406123714.0 cr unu---uuuuu 170329e20000801xx s 000 0 eng 10.1007/s005429900037 doi (NATIONALLICENCE)springer-10.1007/s005429900037 Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probe [Elektronische Daten] [M. Yamamoto, H. Takeuchi, S. Aoki]  In non-destructive dimensional measurement of high aspect ratio micro structures (HARMS), optical methods cannot offer full three dimensional information due to the lack of observation light. Again, conventional mechanical measurement, such as a surface profiler or a coordinate measurement machine, cannot be applied because their stylus is too large. Furthermore, the AFM, though popular among the semiconductor industry, is also limited in terms of dimensional measurement, because its system is usually designed for planar samples. Thus, we have developed a new sensor-integrated micro resonating cantilever probe and a new dimensional measurement machine, which allows the probe's vertical access to microstructures in a sample. The new probe is made of tungsten carbide super hard alloy and possesses design flexibility according to its intended application. Validity of the system is confirmed through the measurement experiment of EDM drilled and chemically etched micro holes. Springer-Verlag Berlin Heidelberg, 2000 Yamamoto M. Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214-8501, Japan E-mail: tyama@mrit.mei.co.jp, JP aut Takeuchi H. Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214-8501, Japan E-mail: tyama@mrit.mei.co.jp, JP aut Aoki S. Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214-8501, Japan E-mail: tyama@mrit.mei.co.jp, JP aut https://doi.org/10.1007/s005429900037 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005429900037 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Yamamoto M. Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214-8501, Japan E-mail: tyama@mrit.mei.co.jp, JP aut NATIONALLICENCE 700 1- Takeuchi H. Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214-8501, Japan E-mail: tyama@mrit.mei.co.jp, JP aut NATIONALLICENCE 700 1- Aoki S. Matsushita Research Institute Tokyo, Inc., 3-10-1 Higashimita, Tama-ku, Kawasaki 214-8501, Japan E-mail: tyama@mrit.mei.co.jp, JP aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer