caa a22 4500 475798422 CHVBK 20180406123730.0 cr unu---uuuuu 170329e20001001xx s 000 0 eng 10.1007/s001700070005 doi (NATIONALLICENCE)springer-10.1007/s001700070005 Influence of the Redeposition effect for Focused Ion Beam 3D Micromachining in Silicon [Elektronische Daten] [Y.Q. Fu, N.K.A. Bryan, O.N. Shing, N.P. Hung] The influence of the redeposition effect on the focused ion beam 3D micromachining process of silicon is discussed. Milling of some typical patterns in which redeposition is serious has been carried out. Experimental results are analysed in combination with a theoretical model. It can be seen from the analysis that the order of recycle-milling is very important for 3D microfabrication owing to redeposition during the process. In addition, the parameters of beam current, ion beam spot size, etc. are also key factors in the process. A groove and dome shape will be formed at the root of the sidewall and the bottom of the pattern, respectively, because of the ion sputtering yield bariation and sidewall redeposition. Finally, avoidance methods are suggested as a result of the analysis.: Springer-Verlag London Limited, 2000 Keywords: Focused ion beam nationallicence Micromachining nationallicence Redeposition nationallicence Fu Y.Q. Precision Engineering Laboratory, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, SG aut Bryan N.K.A. Precision Engineering Laboratory, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, SG aut Shing O.N. Precision Engineering Laboratory, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, SG aut Hung N.P. Precision Engineering Laboratory, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, SG aut https://doi.org/10.1007/s001700070005 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s001700070005 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Fu Y.Q. Precision Engineering Laboratory, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, SG aut NATIONALLICENCE 700 1- Bryan N.K.A. Precision Engineering Laboratory, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, SG aut NATIONALLICENCE 700 1- Shing O.N. Precision Engineering Laboratory, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, SG aut NATIONALLICENCE 700 1- Hung N.P. Precision Engineering Laboratory, School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, SG aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer