caa a22 4500 475798473 CHVBK 20180406123731.0 cr unu---uuuuu 170329e20000201xx s 000 0 eng 10.1007/s001700050030 doi (NATIONALLICENCE)springer-10.1007/s001700050030 Self-Compensated Heterodyne Laser Interferometer [Elektronische Daten] [C. S. Chin, B. K. A. Ngoi] Abstract.: The heterodyne laser interferometer has gained popularity in applications as an encoder system in ultra-precision machines. It can provide ultra high resolution, which satisfies the requirements of ultra-precision machines. The difficulty of using a laser interferometer is the elimination of the effects of change of the refractive index of air whether by variation in environmental conditions or by external effects like air movement, air vibration and mechanical vibration. This paper presents a new technique for the elimination of the effect of refractive index when using a heterodyne laser interferometer. The preliminary results showed that this set-up has a better static error when compared to an industrial laser system. Springer-Verlag London Limited, 1999 Key words.Encoder nationallicence Ultra-precision measurement nationallicence Refractive index compensation nationallicence Heterodyne laser interferometer nationallicence Chin C. S. Precision Engineering Strategic Research Group, School of Mechanical and Production Engineering, Nanyang Technological University, Nanyang, Singapore, SG aut Ngoi B. K. A. Precision Engineering Strategic Research Group, School of Mechanical and Production Engineering, Nanyang Technological University, Nanyang, Singapore, SG aut https://doi.org/10.1007/s001700050030 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s001700050030 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Chin C. S. Precision Engineering Strategic Research Group, School of Mechanical and Production Engineering, Nanyang Technological University, Nanyang, Singapore, SG aut NATIONALLICENCE 700 1- Ngoi B. K. A. Precision Engineering Strategic Research Group, School of Mechanical and Production Engineering, Nanyang Technological University, Nanyang, Singapore, SG aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer