caa a22 4500 475799097 CHVBK 20180406123732.0 cr unu---uuuuu 170329e20000901xx s 000 0 eng 10.1007/s001700070017 doi (NATIONALLICENCE)springer-10.1007/s001700070017 An Acousto-Optic Vibrometer for Measurement of Vibration in Ultra-Precision Machine Tools [Elektronische Daten] [B.K.A. Ngoi, K. Venkatakrishnan] Measurement of vibration is a vital factor that limits the precision and accuracy of machining of micro and macro components. In this paper, a novel technique for measurement of vibration is proposed using an acousto-optic modulator, which highlights an improved approach in measuring vibration in the subnanometre range. An experimental comparison was made with a laser Doppler vibrometer. This novel concept is proposed for application to a precision machine tool to measure the vibration on the machine bed induced during the machining process and by the external environment, which can be compensated for by in-process techniques. This novel measurement technique can also be applied for the precision measurement of the stage movement in ultra-precision machines to a subnanometre resolution.: Springer-Verlag London Limited, 2000 Keywords:Acousto-optic modulator (AOM) nationallicence Acoustic wave nationallicence Bragg cell nationallicence Difraction grating nationallicence Laser Doppler vibrometer nationallicence Ngoi B.K.A. Precision Engineering Strategic Research Group, School of Mechanical and Production Engineering, Nanyang Technological University, Nanyang, Singapore, SG aut Venkatakrishnan K. Precision Engineering Strategic Research Group, School of Mechanical and Production Engineering, Nanyang Technological University, Nanyang, Singapore, SG aut https://doi.org/10.1007/s001700070017 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s001700070017 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ngoi B.K.A. Precision Engineering Strategic Research Group, School of Mechanical and Production Engineering, Nanyang Technological University, Nanyang, Singapore, SG aut NATIONALLICENCE 700 1- Venkatakrishnan K. Precision Engineering Strategic Research Group, School of Mechanical and Production Engineering, Nanyang Technological University, Nanyang, Singapore, SG aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer