caa a22 4500 475809149 CHVBK 20180406123754.0 cr unu---uuuuu 170329e20000401xx s 000 0 eng 10.1007/BF02503672 doi (NATIONALLICENCE)springer-10.1007/BF02503672 Sem calibration in the micrometer and submicrometer ranges by means of a periodic linear measure [Elektronische Daten] [Ch. Volk, Yu. Novikov, A. Rakov] A periodic linear measure is described for use in scanning electron microscopes, which has eight values for line width in the micrometer and submicrometer ranges. Methods have been developed for calibrating the SEM with such a measure, which are not sensitive to errors in beam focusing. Kluwer Academic/Plenum Publishers, 2000 Volk Ch aut Novikov Yu aut Rakov A. aut Measurement Techniques Kluwer Academic Publishers-Plenum Publishers 43/4(2000-04-01), 346-352 0543-1972 43:4<346 2000 43 11018 https://doi.org/10.1007/BF02503672 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02503672 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Volk Ch aut NATIONALLICENCE 700 1- Novikov Yu aut NATIONALLICENCE 700 1- Rakov A. aut NATIONALLICENCE 773 0- Measurement Techniques Kluwer Academic Publishers-Plenum Publishers 43/4(2000-04-01), 346-352 0543-1972 43:4<346 2000 43 11018 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer