caa a22 4500 475809599 CHVBK 20180406123755.0 cr unu---uuuuu 170329e20000201xx s 000 0 eng 10.1007/BF02503574 doi (NATIONALLICENCE)springer-10.1007/BF02503574 Egiazaryan É. aut Study of metrological characteristics of microsensor elements attached by adhesives and glasses [Elektronische Daten] [É. Egiazaryan] Results of experimental studies of the metrological characteristics of pressure microsensors are presented for various methods of attachment by various adhesive compositions and other materials. Tests were performed under various, rather severe operating conditions. Methods are described that allow designers to optimize fabrication technology. Kluwer Academic/Plenum Publishers, 2000 Measurement Techniques Kluwer Academic Publishers-Plenum Publishers 43/2(2000-02-01), 134-139 0543-1972 43:2<134 2000 43 11018 https://doi.org/10.1007/BF02503574 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02503574 text/html Onlinezugriff via DOI NATIONALLICENCE 100 1- Egiazaryan É. aut NATIONALLICENCE 773 0- Measurement Techniques Kluwer Academic Publishers-Plenum Publishers 43/2(2000-02-01), 134-139 0543-1972 43:2<134 2000 43 11018 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer