caa a22 4500 475833937 CHVBK 20180406123848.0 cr unu---uuuuu 170329e20001001xx s 000 0 eng 10.1007/s005210070010 doi (NATIONALLICENCE)springer-10.1007/s005210070010 Neural Network Structures for Optimal Control of LPCVD Reactors [Elektronische Daten] [K. Fakhr-Eddine, M. Cabassud, M.V. Le Lann, J.P. Couderc] In this paper, a new approach of LPCVD reactor modelling and control is presented, based on the use of neural networks. We first present the development of a hybrid networks model of the reactor. The objective is to provide a simulation model which can be used to compute online the film thickness on each wafer. In the second section, the thermal control of a LPCVD reactor is studied. The objective is to develop a multivariable controller to control a space- and time-varying temperature profile inside the reactor. A neural network is designed using a methodology based on process inverse dynamics modelling. Good control results have been obtained when tracking space-time temperature profiles inside the LPCVD reactor pilot plant. Finally, global software is elaborated to achieve film thickness control in an experimental LPCVD reactor pilot plant, in order to get a defined and uniform deposition thickness on the wafers all along the reactor. Experimental results are presented which confirm the efficiency of the optimal control strategy.: Springer-Verlag London Limited, 2000 Keywords. Film thickness control nationallicence Hybrid networks modelling nationallicence LPCVD reactor nationallicence Temperature control nationallicence Fakhr-Eddine K. Laboratoire de Génie Chimique, Ecole Nationale Supérirure d'Ingénieurs de Génie Chimique, Toulouse, France, FR aut Cabassud M. Laboratoire de Génie Chimique, Ecole Nationale Supérirure d'Ingénieurs de Génie Chimique, Toulouse, France, FR aut Le Lann M.V. Laboratoire de Génie Chimique, Ecole Nationale Supérirure d'Ingénieurs de Génie Chimique, Toulouse, France, FR aut Couderc J.P. Laboratoire de Génie Chimique, Ecole Nationale Supérirure d'Ingénieurs de Génie Chimique, Toulouse, France, FR aut https://doi.org/10.1007/s005210070010 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s005210070010 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Fakhr-Eddine K. Laboratoire de Génie Chimique, Ecole Nationale Supérirure d'Ingénieurs de Génie Chimique, Toulouse, France, FR aut NATIONALLICENCE 700 1- Cabassud M. Laboratoire de Génie Chimique, Ecole Nationale Supérirure d'Ingénieurs de Génie Chimique, Toulouse, France, FR aut NATIONALLICENCE 700 1- Le Lann M.V. Laboratoire de Génie Chimique, Ecole Nationale Supérirure d'Ingénieurs de Génie Chimique, Toulouse, France, FR aut NATIONALLICENCE 700 1- Couderc J.P. Laboratoire de Génie Chimique, Ecole Nationale Supérirure d'Ingénieurs de Génie Chimique, Toulouse, France, FR aut Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer