caa a22 4500 475839889 CHVBK 20180406123858.0 cr unu---uuuuu 170329e20000801xx s 000 0 eng 10.1023/A:1004737420926 doi (NATIONALLICENCE)springer-10.1023/A:1004737420926 Oxidation-induced stresses in the isolation oxidation of silicon [Elektronische Daten] [J.D. Evans, M. Vynnycky, S.P. Ferro] The two-dimensional isolation oxidation of silicon is studied in the reaction-controlled limit, which corresponds to the case of initially thin oxides. This limit is both of physical relevance and one of the few regimes in which analytical progress can be made in the whole oxide region. Slowly-varying or long-wave approximations can be used to derive equations that govern the growth of the oxide interfaces (which form two moving boundaries) and the oxidation-induced stresses in the oxide. Here, these equations are solved numerically, by use of a Keller-Box discretisation scheme, complementing previously obtained asymptotic results. The numerical scheme is used to investigate the effects of the nitride-cap rigidity and the initial oxide thickness on both the lateral extent of oxidation (the so-called 'sbird's beak' length) and the stresses that occur on the silicon/silicon-oxide interface. The results from the model are interpreted in dimensional form so that quantitative comparisons can be made with experimental results. Kluwer Academic Publishers, 2000 silicon oxidation nationallicence oxidation-induced stresses nationallicence numerical finite differences nationallicence Keller-Box discretisation scheme nationallicence Evans J.D. Department of Mathematics, The University of Wales, Aberystwyth, SY23 3BZ, Ceredigion, UK aut Vynnycky M. Department of Mechanics, Royal Institute of Technology, S-100 44, Stockholm, Sweden aut Ferro S.P. INFIP-CONICET, Departamento de Fisica, Universidad de Buenos Aires, Pab. 1, Ciudad Universitaria, 1428, Buenos Aires, Argentina aut Journal of Engineering Mathematics Kluwer Academic Publishers 38/2(2000-08-01), 191-218 0022-0833 38:2<191 2000 38 10665 https://doi.org/10.1023/A:1004737420926 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1023/A:1004737420926 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Evans J.D. Department of Mathematics, The University of Wales, Aberystwyth, SY23 3BZ, Ceredigion, UK aut NATIONALLICENCE 700 1- Vynnycky M. Department of Mechanics, Royal Institute of Technology, S-100 44, Stockholm, Sweden aut NATIONALLICENCE 700 1- Ferro S.P. INFIP-CONICET, Departamento de Fisica, Universidad de Buenos Aires, Pab. 1, Ciudad Universitaria, 1428, Buenos Aires, Argentina aut NATIONALLICENCE 773 0- Journal of Engineering Mathematics Kluwer Academic Publishers 38/2(2000-08-01), 191-218 0022-0833 38:2<191 2000 38 10665 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer