caa a22 4500 477042066 CHVBK 20180405111320.0 cr unu---uuuuu 170330e19960701xx s 000 0 eng 10.1007/BF02369925 doi (NATIONALLICENCE)springer-10.1007/BF02369925 Perov I. aut Trends in the development of automated control systems in the production of optoelectronic equipment [Elektronische Daten] [I. Perov] Automated systems for monitoring the physical parameters and controlling the processes involved in the design and fabrication of optoelectronic equipment is analyzed. Various techniques for implementing such systems and the trends in the further development and improvement of such systems are pointed out. Plenum Publishing Corporation, 1997 Measurement Techniques Kluwer Academic Publishers-Plenum Publishers 39/7(1996-07-01), 731-734 0543-1972 39:7<731 1996 39 11018 https://doi.org/10.1007/BF02369925 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02369925 text/html Onlinezugriff via DOI NATIONALLICENCE 100 1- Perov I. aut NATIONALLICENCE 773 0- Measurement Techniques Kluwer Academic Publishers-Plenum Publishers 39/7(1996-07-01), 731-734 0543-1972 39:7<731 1996 39 11018 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer