caa a22 4500 477042538 CHVBK 20180405111321.0 cr unu---uuuuu 170330e19960301xx s 000 0 eng 10.1007/BF02374578 doi (NATIONALLICENCE)springer-10.1007/BF02374578 Coulometric thickness gauges and metrological assurance [Elektronische Daten] [Yu. Begis, L. Babadzhanov] The potentialities of the coulometric method of thickness measurement are analyzed. The design features and technical capabilities of the Limeda DEM microcoulometric thickness gauge are considered. The gauge can be used for measurements on a small area (1 mm2) with a rapid rate of electroetching (0.5 μm/sec). Methods and means of providing metrological assurance for the gauge are briefly outlined. Plenum Publishing Corporation, 1996 Begis Yu aut Babadzhanov L. aut Measurement Techniques Kluwer Academic Publishers-Plenum Publishers 39/3(1996-03-01), 266-273 0543-1972 39:3<266 1996 39 11018 https://doi.org/10.1007/BF02374578 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02374578 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Begis Yu aut NATIONALLICENCE 700 1- Babadzhanov L. aut NATIONALLICENCE 773 0- Measurement Techniques Kluwer Academic Publishers-Plenum Publishers 39/3(1996-03-01), 266-273 0543-1972 39:3<266 1996 39 11018 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer