caa a22 4500 477060056 CHVBK 20180405111357.0 cr unu---uuuuu 170330e19960501xx s 000 0 eng 10.1007/BF02436776 doi (NATIONALLICENCE)springer-10.1007/BF02436776 Measurement of the thickness of semiconducting layers by means of an SHF-waveguide with a flange [Elektronische Daten] [M. Detinko, S. Khoptyar] This article examines an electrodynamic model of an SHF-waveguide with a flange designed to measure the thickness of superconducting layers on conducting substrates. The method of generalized scattering matrices is used to find expressions that make it possible to obtain the distribution of the field in the waveguide and determine the response of the system to a change in the parameters of the superconducting medium. A numerical analysis is performed to select the method of measurement, and sources of random error are examined in an evaluation of the thickness of superconducting layers by the chosen method. It is shown that it is possible to account for the effect of the doping profile of the superconducting layers in measurements. Plenum Publishing Corporation, 1996 Detinko M. aut Khoptyar S. aut Russian Physics Journal Kluwer Academic Publishers-Consultants Bureau 39/5(1996-05-01), 403-407 1064-8887 39:5<403 1996 39 11182 https://doi.org/10.1007/BF02436776 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02436776 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Detinko M. aut NATIONALLICENCE 700 1- Khoptyar S. aut NATIONALLICENCE 773 0- Russian Physics Journal Kluwer Academic Publishers-Consultants Bureau 39/5(1996-05-01), 403-407 1064-8887 39:5<403 1996 39 11182 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer