caa a22 4500 477124593 CHVBK 20180405111646.0 cr unu---uuuuu 170330e19970201xx s 000 0 eng 10.1007/BF02677935 doi (NATIONALLICENCE)springer-10.1007/BF02677935 Detection and mapping of oxygen in silicon wafers by scanning infrared absorption [Elektronische Daten] [Philippe Torchio, Roland Occelli] Scanning Infrared Absorption (S.I.R.A.) setup was carried out for investigating and mapping of microdefects distribution in Czochralski silicon wafers. Using CO2 laser, this non destructive, non contact test method allows transmitted beam local attenuation from oxygen precipitates to be determined. Transmitted intensity It maps from peak height of the 1080 cm−1 absorption band were obtained. An inhomogeneous initial oxygen distribution is found in as-grown samples. The samples were then submitted to preannealing at 750°C for 16 hours, followed by annealing at 900°C for 24 hours. The obtained It fluctuations mapping depicts a ring-shaped distribution of oxygen precipitates. Plenum Publishing Corporation, 1997 Semiconductors nationallicence Infrared Absorption nationallicence CO2 Laser nationallicence Oxygen nationallicence Torchio Philippe Laboratoire d'Optique et Spectrométrie Laser, Case 131, Faculté des Sciences de Marseille-St Jérôme, 13397, Marseille Cédex 20, France aut Occelli Roland Laboratoire d'Optique et Spectrométrie Laser, Case 131, Faculté des Sciences de Marseille-St Jérôme, 13397, Marseille Cédex 20, France aut International Journal of Infrared and Millimeter Waves Kluwer Academic Publishers-Plenum Publishers 18/2(1997-02-01), 491-499 0195-9271 18:2<491 1997 18 10762 https://doi.org/10.1007/BF02677935 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02677935 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Torchio Philippe Laboratoire d'Optique et Spectrométrie Laser, Case 131, Faculté des Sciences de Marseille-St Jérôme, 13397, Marseille Cédex 20, France aut NATIONALLICENCE 700 1- Occelli Roland Laboratoire d'Optique et Spectrométrie Laser, Case 131, Faculté des Sciences de Marseille-St Jérôme, 13397, Marseille Cédex 20, France aut NATIONALLICENCE 773 0- International Journal of Infrared and Millimeter Waves Kluwer Academic Publishers-Plenum Publishers 18/2(1997-02-01), 491-499 0195-9271 18:2<491 1997 18 10762 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer