naa a22 4500 510729304 CHVBK 20180411082946.0 cr unu---uuuuu 180411e20130901xx s 000 0 eng 10.1007/s12200-013-0337-7 doi (NATIONALLICENCE)springer-10.1007/s12200-013-0337-7 Design and implementation of super-heterodyne nano-metrology circuits [Elektronische Daten] [Saeed Olyaee, Zahra Dashtban, Muhammad Dashtban] The most important aim of nanotechnology development is to construct atomic-scale devices, and those atomic-scale devices are required to use some measurements that have ability to control and build in the range of these dimensions. A method based on super-heterodyne interferometers can be used to access the measurements in nano-scale. One of the most important limitations to increase the resolution of the displacement measurement is nonlinearity error. According to the base and measurement signals received by optical section of super-heterodyne interferometer, it is necessary for circuits to reconstruct and detect corresponding phase with target displacement. In this paper, we designed, simulated, and implemented the circuits required for electronic part of interferometer by complementary metal-oxide-semiconductor (CMOS) 0.5 μm technology. These circuits included cascade low-noise amplifiers (LNA) with 19.1 dB gain and 2.5 dB noise figure (NF) at 500 MHz frequency, band-pass filters with 500 MHz central frequency and 400 kHz bandwidth, double-balanced mixers with 233/0.6 μm ratio for metal-oxide-semiconductor field-effect transistors (MOSFETs), and low-pass filters with 300 kHz cutoff frequency. The experimental results show that the amplifiers have 19.41 dB gain and 2.7 dB noise factor, mixers have the ratio of radio frequency to local oscillator (RF/LO) range between 80 and 2500 MHz with intermediate frequency (IF) range between DC to 1000 MHz, and the digital phase measurement circuit based on the time-to-digital converter (TDC) has a nanosecond resolution. Higher Education Press and Springer-Verlag Berlin Heidelberg, 2013 super-heterodyne interferometer nationallicence nanometrology nationallicence low-noise amplifier (LNA) nationallicence double-balanced mixer nationallicence phase measurement nationallicence Olyaee Saeed Nano-photonics and Optoelectronics Research Laboratory, Faculty of Electrical and Computer Engineering, Shahid Rajaee Teacher Training University, 16788-15811, Lavizan, Tehran, Iran aut Dashtban Zahra Nano-photonics and Optoelectronics Research Laboratory, Faculty of Electrical and Computer Engineering, Shahid Rajaee Teacher Training University, 16788-15811, Lavizan, Tehran, Iran aut Dashtban Muhammad Nano-photonics and Optoelectronics Research Laboratory, Faculty of Electrical and Computer Engineering, Shahid Rajaee Teacher Training University, 16788-15811, Lavizan, Tehran, Iran aut Frontiers of Optoelectronics Springer Berlin Heidelberg 6/3(2013-09-01), 318-326 2095-2759 6:3<318 2013 6 12200 https://doi.org/10.1007/s12200-013-0337-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12200-013-0337-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Olyaee Saeed Nano-photonics and Optoelectronics Research Laboratory, Faculty of Electrical and Computer Engineering, Shahid Rajaee Teacher Training University, 16788-15811, Lavizan, Tehran, Iran aut NATIONALLICENCE 700 1- Dashtban Zahra Nano-photonics and Optoelectronics Research Laboratory, Faculty of Electrical and Computer Engineering, Shahid Rajaee Teacher Training University, 16788-15811, Lavizan, Tehran, Iran aut NATIONALLICENCE 700 1- Dashtban Muhammad Nano-photonics and Optoelectronics Research Laboratory, Faculty of Electrical and Computer Engineering, Shahid Rajaee Teacher Training University, 16788-15811, Lavizan, Tehran, Iran aut NATIONALLICENCE 773 0- Frontiers of Optoelectronics Springer Berlin Heidelberg 6/3(2013-09-01), 318-326 2095-2759 6:3<318 2013 6 12200 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer