naa a22 4500 510729517 CHVBK 20180411082947.0 cr unu---uuuuu 180411e20130601xx s 000 0 eng 10.1007/s12200-013-0318-x doi (NATIONALLICENCE)springer-10.1007/s12200-013-0318-x Laser self-mixing interferometer for MEMS dynamic measurement [Elektronische Daten] [Zhaoyun Zhang, Yang Gao, Wei Su] Laser self-mixing interferometer has the advantages of simple architecture, compact size, naturally self-aligned optical characteristics, and low cost. It is promising to replace conventional interferometers for physical measurements, such as displacement, distance, velocity, vibration, and so on. In this paper, this interferometer was tried to be used for micro-electromechanical system (MEMS) dynamic measurement. Firstly, its measurement principle based on a three-mirror cavity model was presented, and then the laser self-mixing interferometer for MEMS dynamic measurement was designed, experiments were finally performed as target moves with different forms. Experimental results suggest that self-mixing interferometer is available for MEMS dynamic measurement, and may have wider applications in the future. Higher Education Press and Springer-Verlag Berlin Heidelberg, 2013 laser self-mixing interferometer nationallicence dynamic measurement nationallicence micro-electro-mechanical system (MEMS) nationallicence Zhang Zhaoyun Institute of Electronic Engineering, China Academy of Engineering Physics, 621900, Mianyang, China aut Gao Yang Institute of Electronic Engineering, China Academy of Engineering Physics, 621900, Mianyang, China aut Su Wei Institute of Electronic Engineering, China Academy of Engineering Physics, 621900, Mianyang, China aut Frontiers of Optoelectronics SP Higher Education Press 6/2(2013-06-01), 210-215 2095-2759 6:2<210 2013 6 12200 https://doi.org/10.1007/s12200-013-0318-x text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12200-013-0318-x text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Zhang Zhaoyun Institute of Electronic Engineering, China Academy of Engineering Physics, 621900, Mianyang, China aut NATIONALLICENCE 700 1- Gao Yang Institute of Electronic Engineering, China Academy of Engineering Physics, 621900, Mianyang, China aut NATIONALLICENCE 700 1- Su Wei Institute of Electronic Engineering, China Academy of Engineering Physics, 621900, Mianyang, China aut NATIONALLICENCE 773 0- Frontiers of Optoelectronics SP Higher Education Press 6/2(2013-06-01), 210-215 2095-2759 6:2<210 2013 6 12200 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer