naa a22 4500 510770908 CHVBK 20180411083213.0 cr unu---uuuuu 180411e20131201xx s 000 0 eng 10.1007/s11837-013-0676-2 doi (NATIONALLICENCE)springer-10.1007/s11837-013-0676-2 Improved Diffusion-Resistant Ability of Multicomponent Nitrides: From Unitary TiN to Senary High-Entropy (TiTaCrZrAlRu)N [Elektronische Daten] [Shou-Yi Chang, Yi-Ching Huang, Chen-En Li, Hsun-Feng Hsu, Jien-Wei Yeh, Su-Jien Lin] Multicomponent high-entropy nitrides have been attempted as robust diffusion barrier materials to inhibit the severe interdiffusion of Cu and Si; however, the improvement in their diffusion resistance relative to the abilities of few-component nitrides has actually not been verified. Thus, in this study, nitride barriers with different numbers of components (metallic elements), from unitary TiN to senary high-entropy (TiTaCrZrAlRu)N (with the same face-centered cubic structure and a thickness of 5nm), were prepared. The failure of these nitride barriers in resisting the interdiffusion of Cu and Si was examined, and the activation energy of Cu diffusion through the nitrides was determined. With more components incorporated, the failure temperature of the nitrides was found to markedly increase from 550°C to 900°C, and the activation energy of Cu diffusion was effectively raised from 107kJ/mol to 161kJ/mol. Severe lattice distortions and random cohesions are suggested as the dominant factors for the improved diffusion-resistant ability of the multicomponent high-entropy nitrides. TMS, 2013 Chang Shou-Yi Department of Materials Science and Engineering, National Chung Hsing University, 40227, Taichung, Taiwan aut Huang Yi-Ching Department of Materials Science and Engineering, National Chung Hsing University, 40227, Taichung, Taiwan aut Li Chen-En Department of Materials Science and Engineering, National Chung Hsing University, 40227, Taichung, Taiwan aut Hsu Hsun-Feng Department of Materials Science and Engineering, National Chung Hsing University, 40227, Taichung, Taiwan aut Yeh Jien-Wei Department of Materials Science and Engineering, National Tsing Hua University, 30013, Hsinchu, Taiwan aut Lin Su-Jien Department of Materials Science and Engineering, National Tsing Hua University, 30013, Hsinchu, Taiwan aut JOM Springer US; http://www.springer-ny.com 65/12(2013-12-01), 1790-1796 1047-4838 65:12<1790 2013 65 11837 https://doi.org/10.1007/s11837-013-0676-2 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11837-013-0676-2 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Chang Shou-Yi Department of Materials Science and Engineering, National Chung Hsing University, 40227, Taichung, Taiwan aut NATIONALLICENCE 700 1- Huang Yi-Ching Department of Materials Science and Engineering, National Chung Hsing University, 40227, Taichung, Taiwan aut NATIONALLICENCE 700 1- Li Chen-En Department of Materials Science and Engineering, National Chung Hsing University, 40227, Taichung, Taiwan aut NATIONALLICENCE 700 1- Hsu Hsun-Feng Department of Materials Science and Engineering, National Chung Hsing University, 40227, Taichung, Taiwan aut NATIONALLICENCE 700 1- Yeh Jien-Wei Department of Materials Science and Engineering, National Tsing Hua University, 30013, Hsinchu, Taiwan aut NATIONALLICENCE 700 1- Lin Su-Jien Department of Materials Science and Engineering, National Tsing Hua University, 30013, Hsinchu, Taiwan aut NATIONALLICENCE 773 0- JOM Springer US; http://www.springer-ny.com 65/12(2013-12-01), 1790-1796 1047-4838 65:12<1790 2013 65 11837 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer