naa a22 4500 510771424 CHVBK 20180411083215.0 cr unu---uuuuu 180411e20130401xx s 000 0 eng 10.1007/s11837-013-0566-7 doi (NATIONALLICENCE)springer-10.1007/s11837-013-0566-7 Protective CVD Mullite Coatings on Single-Crystal Silicon Substrates [Elektronische Daten] [Jiapeng Xu, Daniel Erickson, Sudesna Roy, Vinod Sarin] Silicon has long been the primary material of choice for microelectromechanical systems (MEMS) and integrated circuit (IC) applications. However, it is prone to degradation under severe conditions such as high humidity, high temperature, and corrosive environments. To overcome such extreme conditions and help silicon perform with stability and extended lifetimes, a protection layer is proposed. Mullite (3Al2O3·2SiO2) is a known environmental barrier coating (EBC) material and has been shown to be effective on other Si-based ceramic materials. In this work, dense, high-purity crystalline mullite coatings were deposited onto single-crystal silicon substrates via chemical vapor deposition (CVD). The microstructure, orientation preference, and adhesion of these coatings were investigated. Substrate integrity in relation to the substrate/coating interface by chemical etching and coating stability in a simulated severe environment under corrosive alkali salts were investigated. TMS, 2013 Xu Jiapeng Division of Materials Science and Engineering, Boston University, 02446, Brookline, MA, USA aut Erickson Daniel Division of Materials Science and Engineering, Boston University, 02446, Brookline, MA, USA aut Roy Sudesna Division of Materials Science and Engineering, Boston University, 02446, Brookline, MA, USA aut Sarin Vinod Division of Materials Science and Engineering, Boston University, 02446, Brookline, MA, USA aut JOM Springer US; http://www.springer-ny.com 65/4(2013-04-01), 567-573 1047-4838 65:4<567 2013 65 11837 https://doi.org/10.1007/s11837-013-0566-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11837-013-0566-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Xu Jiapeng Division of Materials Science and Engineering, Boston University, 02446, Brookline, MA, USA aut NATIONALLICENCE 700 1- Erickson Daniel Division of Materials Science and Engineering, Boston University, 02446, Brookline, MA, USA aut NATIONALLICENCE 700 1- Roy Sudesna Division of Materials Science and Engineering, Boston University, 02446, Brookline, MA, USA aut NATIONALLICENCE 700 1- Sarin Vinod Division of Materials Science and Engineering, Boston University, 02446, Brookline, MA, USA aut NATIONALLICENCE 773 0- JOM Springer US; http://www.springer-ny.com 65/4(2013-04-01), 567-573 1047-4838 65:4<567 2013 65 11837 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer