naa a22 4500 510771459 CHVBK 20180411083215.0 cr unu---uuuuu 180411e20130401xx s 000 0 eng 10.1007/s11837-013-0571-x doi (NATIONALLICENCE)springer-10.1007/s11837-013-0571-x Deposition and Characterization of Tungsten Carbide Thin Films by DC Magnetron Sputtering for Wear-Resistant Applications [Elektronische Daten] [Tolga Tavsanoglu, Ceren Begum, Murat Alkan, Onuralp Yucel] In this study, WC (tungsten carbide) thin films were deposited on high-speed steel (AISI M2) and Si (100) substrates by direct current magnetron sputtering of a tungsten carbide target having 7% cobalt as binding material. The properties of the coatings have been modified by the change in the bias voltages from grounded to 200V. All the coatings were deposited at 250°C constant temperature. The microstructure and the thickness of the films were determined from cross-sectional field-emission gun scanning electron microscope micrographs. The chemical composition of the film was determined by electron probe micro analyzer. The x-ray diffractometer has been used for the phase analyses. Nanoindentation and wear tests were used to determine the mechanical and tribological properties of the films, respectively. It is found that the increase in the bias voltages increased drastically the hardness and elastic modulus, decreased the friction coefficient values and increased the wear resistance of tungsten carbide thin films by a phase transformation from metallic W (tungsten) to a nonstoichiometric WC1−x (tungsten carbide) phase. TMS, 2013 Tavsanoglu Tolga Metallurgical and Materials Engineering Department, Istanbul Technical University, Maslak, 34469, Istanbul, Turkey aut Begum Ceren Metallurgical and Materials Engineering Department, Istanbul Technical University, Maslak, 34469, Istanbul, Turkey aut Alkan Murat Metallurgical and Materials Engineering Department, Istanbul Technical University, Maslak, 34469, Istanbul, Turkey aut Yucel Onuralp Metallurgical and Materials Engineering Department, Istanbul Technical University, Maslak, 34469, Istanbul, Turkey aut JOM Springer US; http://www.springer-ny.com 65/4(2013-04-01), 562-566 1047-4838 65:4<562 2013 65 11837 https://doi.org/10.1007/s11837-013-0571-x text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11837-013-0571-x text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Tavsanoglu Tolga Metallurgical and Materials Engineering Department, Istanbul Technical University, Maslak, 34469, Istanbul, Turkey aut NATIONALLICENCE 700 1- Begum Ceren Metallurgical and Materials Engineering Department, Istanbul Technical University, Maslak, 34469, Istanbul, Turkey aut NATIONALLICENCE 700 1- Alkan Murat Metallurgical and Materials Engineering Department, Istanbul Technical University, Maslak, 34469, Istanbul, Turkey aut NATIONALLICENCE 700 1- Yucel Onuralp Metallurgical and Materials Engineering Department, Istanbul Technical University, Maslak, 34469, Istanbul, Turkey aut NATIONALLICENCE 773 0- JOM Springer US; http://www.springer-ny.com 65/4(2013-04-01), 562-566 1047-4838 65:4<562 2013 65 11837 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer