naa a22 4500 51077153X CHVBK 20180411083215.0 cr unu---uuuuu 180411e20130401xx s 000 0 eng 10.1007/s11837-013-0569-4 doi (NATIONALLICENCE)springer-10.1007/s11837-013-0569-4 Improved Mobility and Transmittance of Room-Temperature-Deposited Amorphous Indium Gallium Zinc Oxide (a-IGZO) Films with Low-Temperature Postfabrication Anneals [Elektronische Daten] [T. Alford, M. Gadre, Rajitha Vemuri] Thin films of amorphous indium gallium zinc oxide with high transmittance were deposited at room temperature onto flexible polymer substrates. Postdeposition anneals were performed at low temperatures in different ambients to obtain films with one of the highest transmittance and mobility values reported in the literature. As-deposited and postanneal films were characterized for electrical and optical properties. Oxygen anneal degraded the electrical performance of the films, which was recovered by succeeding vacuum anneals. A surface scattering model is proposed to determine the relation between mobility and carrier concentrations at low values of carrier concentrations. This model takes into account electronic scattering as a result of grain structure and morphology. TMS, 2013 Alford T. School for Engineering of Matter, Transport and Energy, Arizona State University, 85287, Tempe, AZ, USA aut Gadre M. School for Engineering of Matter, Transport and Energy, Arizona State University, 85287, Tempe, AZ, USA aut Vemuri Rajitha School for Engineering of Matter, Transport and Energy, Arizona State University, 85287, Tempe, AZ, USA aut JOM Springer US; http://www.springer-ny.com 65/4(2013-04-01), 519-524 1047-4838 65:4<519 2013 65 11837 https://doi.org/10.1007/s11837-013-0569-4 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11837-013-0569-4 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Alford T. School for Engineering of Matter, Transport and Energy, Arizona State University, 85287, Tempe, AZ, USA aut NATIONALLICENCE 700 1- Gadre M. School for Engineering of Matter, Transport and Energy, Arizona State University, 85287, Tempe, AZ, USA aut NATIONALLICENCE 700 1- Vemuri Rajitha School for Engineering of Matter, Transport and Energy, Arizona State University, 85287, Tempe, AZ, USA aut NATIONALLICENCE 773 0- JOM Springer US; http://www.springer-ny.com 65/4(2013-04-01), 519-524 1047-4838 65:4<519 2013 65 11837 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer